Monolithic quartz vibrating beam accelerometer

Details Monolithic quartz vibrating beam accelerometer Monolithic quartz vibrating beam accelerometer

Jun 1992

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1992esasp.340..217d&link_type=abstract

In ESA, Frequency and Time Forum p 217-218 (SEE N93-24978 09-70)

Statistics

Applications

Accelerometers, Chemical Machining, Etching, Excitation, Integrated Circuits, Piezoelectricity, Quartz Crystals, Vibration, Crystal Oscillators, Flexing, Miniaturization, Wafers

Scientific paper

A monolithic quartz vibrating beam accelerometer is described. The objective is machining, by chemical etching process, miniature accelerometers suitable for various applications, like guidance systems, and vehicle dynamic control. The monolithic quartz active part includes two vibrating beams, the proof mass, and its articulation in a base. It is obtained by a process similar to the one used in watch crystal manufacturing, so the potential cost is very low. The simplicity of piezoelectric excitation and the numerical output (frequency signal) are key features to reduce dimensions and cost. The expected accuracy of this sensor is 0.003 in a harsh environment. First experimental results are presented.

Affiliated with

Also associated with

No associations

Rating

Monolithic quartz vibrating beam accelerometer does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.

If you have personal experience with Monolithic quartz vibrating beam accelerometer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Monolithic quartz vibrating beam accelerometer will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFWR-SCP-O-1203699