MOEMS-based Adaptive Optics: technology and optical design

Mathematics – Logic

Scientific paper

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Scientific paper

Extremely large optical telescopes, ranging from 40 to 100m are currently under study in different research groups around the world. These telescopes will rely on the availability of highly performing adaptive optical systems with of the order of 100 000 actuators. This number of actuators is prohibitive for conventional technology (stacked piezoelectric actuators, bimorph mirrors), but can be achieved by the development of new technologies based on micro-opto-electro-mechanical systems (MOEMS). I will present different MOEMS concepts and show their great potential to reach the specifications required by AO in astronomy. However, MOEMS present some technological limitations regarding actuators stroke (< 10 microns) and overall size (size of the wafer). These limitations stress some parameters of the AO system optical design, such as the possibility to correct low order perturbations, the axial separation between the deformable mirrors, and the size of the internal pupil.

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