Astronomy and Astrophysics – Astronomy
Scientific paper
Jul 2008
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2008pobeo..84..201n&link_type=abstract
Publications of the Astronomical Observatory of Belgrade, vol. 84, pp. 201-204
Astronomy and Astrophysics
Astronomy
Scientific paper
This paper presents a study of the structure and composition of Cr-N thin films as a function of deposition parameters and ion irradiation. Thin films were deposited by reactive ion sputtering on (100) Si substrates, to a thickness of 240-280 nm, at different nitrogen partial pressures. After deposition the samples were irradiated with 120 keV argon ions, to the fluences of 1 x10^15 and 1 x 10^16 ions/cm^2. Structural characterization of the samples was performed by Rutherford backscattering spectrometry, x-ray diffraction and cross-sectional transmission electron microscopy. It was found that the film composition, Cr_2N or CrN, strongly depends on the nitrogen partial pressure during deposition. Ion irradiation induces local microstructural changes, formation of nano - particles and defects.
Bibic N.
Milinovic V.
Milosavljevic Milos
Novakovic M.
Perusko D.,
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