Micromachined uncooled VO2-based IR bolometer arrays

Details Micromachined uncooled VO2-based IR bolometer arrays Micromachined uncooled VO2-based IR bolometer arrays

Jun 1996

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1996spie.2746...60j&link_type=abstract

Proc. SPIE Vol. 2746, p. 60-71, Infrared Detectors and Focal Plane Arrays IV, Eustace L. Dereniak; Robert E. Sampson; Eds.

Computer Science

Performance

4

Scientific paper

Bulk silicon micromachined IR bolometer detectors operating at room temperature are presented. These devices are based on VO(subscript 2) films typically exhibiting a thermal coefficient of resistance of the order of -3%/ degree(s)C. Detector sizes are 50 micrometers X 50 micrometers and 100 micrometers X 100 micrometers , and they are arranged in 1 X 64, 1 X 128 and 1 X 256 pixel linear arrays. A test bench for detector performance evaluation is described. The fabricated detectors exhibit responsivities of up to approximately 20,000 V/W, normalized detectivities typically exceeding 10(superscript 8) cmHz(superscript 1/2) W(superscript -1), and response times typically below 20 ms, At 300 K and a frequency of 30 Hz, the noise equivalent temperature difference for these detectors is of the order of 3 X 10(superscript -2) degree(s)C. A bolometer simulation tool is also briefly described.

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