Micro-Scanning Electron Microscope and X-ray Spectrometer for Planetary Exploration

Details Micro-Scanning Electron Microscope and X-ray Spectrometer for Planetary Exploration Micro-Scanning Electron Microscope and X-ray Spectrometer for Planetary Exploration

Dec 2007

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2007agufm.p21a0227b&link_type=abstract

American Geophysical Union, Fall Meeting 2007, abstract #P21A-0227

Biology

0406 Astrobiology And Extraterrestrial Materials, 5494 Instruments And Techniques, 6094 Instruments And Techniques, 6297 Instruments And Techniques

Scientific paper

Scanning Electron Microscopy combined with electron-induced X-ray Fluorescence Spectroscopy (SEM-EDX) is one of the most powerful techniques for characterizing surface morphology and composition with spatial resolution of a micrometer or better. SEM-EDX can elucidate natural processes such as low-temperature diagenesis, thermal or pressure induced metamorphism, volcanism/magmatism, atmosphere/crust interaction and the like. This information is useful for the investigation of the natural history of solar system objects. We are developing a prototype micromachined scanning electron microscope with X-ray spectrometer (MSEMS) for solar system exploration. The MSEMS is comprised of a carbon nanotube field emission (CNTFE) electron source integrated with a micro-electro-mechanical-system (MEMS) based electron gun and electron optics structure. The MSEMS system will utilize a piezoelectric sample stage, having scan ranges from a few angstroms to several hundreds of microns. Compared with conventional electron sources, the CNTFE source offers advantages of low power usage, ultra-small source size and simplicity of electrostatic focusing. The MSEMS instrument, including CNTFE source, MEMS electron optic column and piezoelectric sample stage, is envisioned to be 1-2 cm in height and will operate in the range of 500 eV to 15 KeV. The imaging resolution of MEMS is predicted to be ~10 nm at 5 KeV and the spatial resolution of the X-ray spectrometer will be ~1 μm at 15 KeV. We will present field emission data from our CNTFE source as well as the MEMS electron gun and piezostage designs.

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