MEMS tip/tilt and piston mirror arrays as diffractive optical elements

Details MEMS tip/tilt and piston mirror arrays as diffractive optical elements MEMS tip/tilt and piston mirror arrays as diffractive optical elements

Aug 2005

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2005spie.5894..113r&link_type=abstract

Advanced Wavefront Control: Methods, Devices, and Applications III. Edited by Gruneisen, Mark T.; Gonglewski, John D.; Giles, M

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We present an analytic evaluation of the optical performance of a tip/tilt and piston Spatial Light Modulator, for use in adaptive optic and beam steering applications. The impact of array fill factor, pixel curvature, position and tilt accuracy, and pixel yield are discussed in detail. Two arrangements for beam steering are presented and analyzed; in the first the SLM is used as a programmable higher-order diffraction grating, and in the second the SLM acts as a programmable Fresnel lens inside a telescope.

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