MEMS loop heat pipe based on coherent porous silicon technology

Statistics – Applications

Scientific paper

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Micro- And Nano-Electromechanical Systems And Devices, Heat Engines, Heat Pumps, Heat Pipes, Heat Flow In Multiphase Systems

Scientific paper

This paper discusses the theory, modeling, design, fabrication and preliminary test results of the MEMS loop heat pipe being developed at the Center for Microelectronic Sensors and MEMS at the University of Cincinnati. The emphasis is placed upon the silicon micro wick and its production through a novel technique known as Coherent Porous Silicon (CPS) Technology. .

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