Mechanical Fatigue on Gold MEMS Devices: Experimental Results

Details Mechanical Fatigue on Gold MEMS Devices: Experimental Results Mechanical Fatigue on Gold MEMS Devices: Experimental Results

2008-05-07

arxiv.org/abs/0805.0945v1

Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2008, Nice : France (2008)

Computer Science

Other Computer Science

Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)

Scientific paper

The effect of mechanical fatigue on structural performances of gold devices is investigated. The pull-in voltage of special testing micro-systems is monitored during the cyclical load application. The mechanical collapse is identified as a dramatic loss of mechanical strength of the specimen. The fatigue limit is estimated through the stair-case method by means of the pull-in voltage measurements. Measurements are performed by means of the optical interferometric technique.

Affiliated with

Also associated with

No associations

Rating

Mechanical Fatigue on Gold MEMS Devices: Experimental Results does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.

If you have personal experience with Mechanical Fatigue on Gold MEMS Devices: Experimental Results, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Mechanical Fatigue on Gold MEMS Devices: Experimental Results will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFWR-SCP-O-491376