Computer Science
Scientific paper
Jul 2000
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2000spie.4003...91o&link_type=abstract
Proc. SPIE Vol. 4003, p. 91-97, Optical Design, Materials, Fabrication, and Maintenance, Philippe Dierickx; Ed.
Computer Science
Scientific paper
A CNC-controlled precision measuring machine is a very powerful tool in the optical shop not only to determine the surface figure, but also to qualify the radius of curvature and conic constant of aspherics. We used a commercially available 3D-coordinate measuring machine (CMM, ZEISS UPMC 850 CARAT S-ACC) to measure the shape of the GEMINI 1-m convex secondary mirrors at different lapping and polishing stages. To determine the measuring accuracy we compared the mechanical measurements with the results achieved by means of an interferometrical test setup. The data obtained in an early stage of polishing were evaluated in Zernike polynomials which show a very good agreement. The deviation concerning long wave rotational symmetrical errors was 20 nm rms, whereas the accuracy measuring of mid spatial frequency deviations was limited to about 100 nm rms.
Matthes Axel
Otto Wolfgang
Schiehle Heinz
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