Measurement of voltage and current in continuous and pulsed RF and DC glow discharges

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Scientific paper

Electrical measurements are an important tool for the characterisation of glow discharges and have proved to be useful for a variety of needs in fundamental studies and as control parameter. Therefore, extensive hardware developments and studies of I-U characteristics in continuous and pulsed, dc and rf modes have been made (Wilken et al. 2007) and will be presented together with new results.
In continuous dc mode, the I-U curves are non-linear and may be characterised by a threshold voltage U_0 and saturation current I_max (both cathode material and pressure dependent). On the other hand P-U curves are to a large extent linear and very similar in the continuous rf mode (Hoffmann et al. 1998). The ionic part of time resolved I-U curves of rf discharges however shows almost a linear behaviour and the capacitive component is small. No saturation current exists. This led to the assumption that gas heating is responsible for the non-linearity between U and I in continuous dc discharges. Consistent with this assumption, a dependence of the U-I curves of pulsed discharges on the duty cycle was found. The comparison of the curves with those at low duty cycle (cold) led to a rough estimation of the gas temperature.
Owing to the large changes of current in a very short time, the measurement of the electronic part of the U-I curve in rf mode is far more difficult. If conducting samples are analysed, this electronic part contains extra information. For pulsed rf discharges the hysteresis of electronic part increased with decreasing duty cycle (lower gas temperature). In a study of the effect of the addition of small amounts of H_2 to the Ar discharge gas similar changes in the electronic part of the U-I curve were observed whereas the ionic part was identical. Further investigation and cooperation with modelling groups is needed and planned to explain these results.

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