Computer Science – Performance
Scientific paper
Aug 2005
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2005spie.5868..252n&link_type=abstract
Optical Materials and Structures Technologies II. Edited by Goodman, William A. Proceedings of the SPIE, Volume 5868, pp. 252
Computer Science
Performance
Scientific paper
Material properties and performances for near future applications were studied for low thermal expansion glass-ceramics; CLEARCERAM series produced by OHARA Inc. In the material study, the improved CTE characteristics of CLEARCERAM-Z HS over conventional CLEARCERAM-Z were shown with interferometric CTE metrology system with 2ppb/degree C repeatability. Also the material uniformity was evaluated by means of refractive index homogeneity. In the application study, the capabilities of CLEARCERAM-Z HS for near future precision applications, Extreme Ultra Violet Lithography (EUVL) system component and extremely large telescope mirror applications were discussed by reviewing actual data prepared in accordance with the existing specifications for each application. For EUVL system component application, inter lot CTE uniformity and surface finish data meeting the SEMI P37 specification were presented and the performance was evaluated. For extremely large telescope mirror application, intra disk uniformity of CTE and stress birefringence for Dia.780mm CLEARCERAM-Z HS meeting mirror blanks specification of existing extremely large telescope project were demonstrated and the potential performance of CLEARCERAM-Z HS for the application was shown with the on-going integration of the size availability at OHARA Inc.
Kawasaki Nobuo
Nakajima Kousuke
Nakajima Toshihide
Owari Yoshiyuki
No associations
LandOfFree
Material and application study for low thermal expansion glass-ceramic CLEARCERAM series does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.
If you have personal experience with Material and application study for low thermal expansion glass-ceramic CLEARCERAM series, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Material and application study for low thermal expansion glass-ceramic CLEARCERAM series will most certainly appreciate the feedback.
Profile ID: LFWR-SCP-O-798860