Statistics – Applications
Scientific paper
Feb 2002
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2002spie.4493...13p&link_type=abstract
Proc. SPIE Vol. 4493, p. 13-20, High-Resolution Wavefront Control: Methods, Devices, and Applications III, John D. Gonglewski; M
Statistics
Applications
Scientific paper
Manufacturing of optical quality micromachined deformable mirrors for use in adaptive optic (AO) correction is described. Several non-standard manufacturing techniques have been developed to improve optical quality of surface micromachined mirrors. Two challenges to manufacturing optical quality micromachined mirrors are reducing surface roughness and increasing reflectivity. A chemo-mechanical polishing process has been used to improve surface quality of the mirrors, and a gold coating process has been developed to improve the reflectivity without introducing a significant amount of stress in the mirror membrane. Surface reflectivity and topography measurements of optically flat and smooth mirrors are presented. Based on these results, a new 1024 actuator mirror has been designed and is currently being fabricated. Design considerations and performance expectations for this mirror will be presented.
Bierden Paul A.
Bifano Thomas G.
Horenstein Mark N.
Perreault Julie A.
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