Computer Science
Scientific paper
Jan 1993
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1993phdt........51h&link_type=abstract
Thesis (PH.D.)--THE UNIVERSITY OF ROCHESTER, 1993.Source: Dissertation Abstracts International, Volume: 54-09, Section: B, page:
Computer Science
Scientific paper
Several problems associated with the temperature rise in a thin film due to localized heating of the film are studied. The heat conduction equation is solved under steady state conditions for thermo loads corresponding to localized heating of the surface of the film. The results are used to extend the applicability of the thermal comparator method for films deposited on substrates of arbitrary thickness. Correlations are made for the thermal conductivity of diamond-like carbon films and ceramic films with thickness in the micron range. A detailed model which accounts for the film thickness and the position of an absorbing inclusion (i.e., the distance of the inclusion from the film surface and the film/substrate interface) is developed. It predicts the laser damage resistance better than the previous model which only considers an absorbing inclusion embedded within a non-absorbing infinite matrix. It is shown that such a model may not be accurate when the thermal conductivity is very low. An approximation method is employed to study this model when the thermal conductivity is temperature dependent. The stress field around the interface of the inclusion and the film are obtained to determine the damage which is caused by thermal or mechanical failure.
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