Lightweight instrument mirrors from single-crystal silicon

Details Lightweight instrument mirrors from single-crystal silicon Lightweight instrument mirrors from single-crystal silicon

Jul 2006

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2006spie.6265e..81b&link_type=abstract

Space Telescopes and Instrumentation I: Optical, Infrared, and Millimeter. Edited by Mather, John C.; MacEwen, Howard A.; de Gr

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We describe a process for fabricating lightweight mirrors from single crystal silicon. We also report ambient and cryogenic test results on a variety of mirrors made by this process. Each mirror is a monolithic structure from a single crystal of silicon. Masses are typically 1/3rd to 1/4th that of an equal diameter solid quartz mirror. We avoid print through of the supporting structure by lightweighting after the optical surface has been formed. Because of the extraordinary homogeneity of single crystal silicon, distortion of the optical surface by the lightweighting process is negligible for most applications (<1/40th wave RMS @ 633nm). This homogeneity also accounts for the near zero distortion at cryogenic temperatures.

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