Lattice-Boltzmann Simulations of Fluid Flows in MEMS

Details Lattice-Boltzmann Simulations of Fluid Flows in MEMS Lattice-Boltzmann Simulations of Fluid Flows in MEMS

1998-06-11

arxiv.org/abs/comp-gas/9806001v1

Nonlinear Sciences

Cellular Automata and Lattice Gases

3 pages, 6 figures, revtex. submitted to Physics of Fluids

Scientific paper

The lattice Boltzmann model is a simplified kinetic method based on the particle distribution function. We use this method to simulate problems in MEMS, in which the velocity slip near the wall plays an important role. It is demonstrated that the lattice Boltzmann method can capture the fundamental behavior in micro-channel flow, including velocity slip and nonlinear pressure drop along the channel. The Knudsen number dependence of the position of the vortex center and the pressure contour in micro-cavity flows is also demonstrated.

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