Laser technologies for micro-optics fabrication

Details Laser technologies for micro-optics fabrication Laser technologies for micro-optics fabrication

Jul 1993

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1993spie.1874...93v&link_type=abstract

Proc. SPIE Vol. 1874, p. 93-102, Infrared and Millimeter-Wave Engineering, Harold T. Buscher; Ed.

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Scientific paper

Here we try to summarize modern views on physical essence and technical
opportunities of different laser technologies for MOC fabrication. This
paper based previously on our own investigations made at the Laser
Technologies Chair of IFMO, St. Petersburg and sometimes on the
experience of other authors.

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