Large sputtering coating plant working with a mode of scan

Details Large sputtering coating plant working with a mode of scan Large sputtering coating plant working with a mode of scan

Jul 2006

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2006spie.6273e..83g&link_type=abstract

Optomechanical Technologies for Astronomy. Edited by Atad-Ettedgui, Eli; Antebi, Joseph; Lemke, Dietrich. Proceedings of the S

Astronomy and Astrophysics

Astronomy

Scientific paper

Introduction to design thought of a large vacuum sputtering coating plant for astronomical telescope. The coating plant is square and all working cells are installed on a holder inside the chamber. When the plant door open, the holder with working cells is hauled out of chamber, then maintaining, repair and installing mirrors are very easy. Metal film and dielectric film are made with DC and RF magnetron sputtering respectively. The largest diameter of mirror is 1600 mm and the diameter of sputtering target is 160 mm. The whole mirror is coated by the polar coordinate scanning through computer control. There are three advantage: large mirror is sputtered with small power supply, so the cost is saved; By computer controlling working parameter of scanning, better uniformity can achieve; scanning sputtering can correct the mirror surface.

Affiliated with

Also associated with

No associations

Rating

Large sputtering coating plant working with a mode of scan does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.

If you have personal experience with Large sputtering coating plant working with a mode of scan, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Large sputtering coating plant working with a mode of scan will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFWR-SCP-O-1893410