Ion Beam Induced Charge Collection (IBICC) Studies and Focused Heavy Ion Microprobe Facility at the University of North Texas

Details Ion Beam Induced Charge Collection (IBICC) Studies and Focused Heavy Ion Microprobe Facility at the University of North Texas Ion Beam Induced Charge Collection (IBICC) Studies and Focused Heavy Ion Microprobe Facility at the University of North Texas

Mar 1998

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1998aps..tss...a05g&link_type=abstract

Geophysical Research Letters, Volume 24, Issue 18, p.2263

Astronomy and Astrophysics

Astrophysics

7519 Solar Physics, Astrophysics, And Astronomy, Flares 7554 X Rays, Gamma Rays, And Neutrinos

Scientific paper

As the feature sizes reduce, semiconductor devices increase their sensitivity to ionizing radiation that creates electron-hole pairs. The induced charge collection by the device p-n junctions can alter the state of the device, most commonly causing memory errors. To design robust devices immune to these effects, it is essential to create and test accurate models of this process. Such model-based testing requires energetic heavy ions whose number, arrival time, spatial location, energy, and angle can be controlled when they strike the integrated circuit. IBMAL is building a strong focusing lens system with spatial resolution 1μ m, raster-scanning capabilities for alpha particles and heavier ions. A detailed description of the focused heavy ion microprobe facility and IBICC experimental results conducted at Sandia National Laboratory will be presented.

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