Computer Science – Performance
Scientific paper
Jan 1993
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1993spie.1742..453b&link_type=abstract
In: Multilayer and grazing incidence X-ray/EUV optics for astronomy and projection lithography; Proceedings of the Meeting, San
Computer Science
Performance
Extreme Ultraviolet Radiation, Gratings (Spectra), Interferometry, Mirrors, Performance Tests, Test Chambers, Ultraviolet Detectors, Ultraviolet Spectrometers
Scientific paper
The measurement of the shape and optical performance of toroidal mirrors has always presented a challenge to the manufacturer and user of these types of optical elements. This report presents a technique for evaluating the complex shape and optical performance of long radius toroidal mirrors that are to be used in the EUV. The measurement techniques will be discussed and examples given. Interferometric analysis will be presented. Performance spot diagrams and MTF analysis will be discussed. Manufacturing techniques will be evaluated with respect to the application of more definitive measurement technology.
Baker Phillip
Bergamini Paolo
Berger Tom
Gethyn Timothy J.
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