Integrated 3D Sound Intensity Sensor with Four-Wire Particle Velocity Sensors

Details Integrated 3D Sound Intensity Sensor with Four-Wire Particle Velocity Sensors Integrated 3D Sound Intensity Sensor with Four-Wire Particle Velocity Sensors

2008-05-07

arxiv.org/abs/0805.0906v1

Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2008, Nice : France (2008)

Computer Science

Other Computer Science

Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)

Scientific paper

A new symmetrical four-wire sensor configuration has resulted in a fully
integrated sound intensity sensor with significant lower noise floor and
smaller size than its predecessors. An integrated sound pressure sensor was
further miniaturized by using a folded "back chamber" at both sides of the
chip.

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