Identification of Test Structures for Reduced Order Modeling of the Squeeze Film Damping in Mems

Details Identification of Test Structures for Reduced Order Modeling of the Squeeze Film Damping in Mems Identification of Test Structures for Reduced Order Modeling of the Squeeze Film Damping in Mems

2008-02-21

arxiv.org/abs/0802.3076v1

Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)

Computer Science

Other Computer Science

Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)

Scientific paper

In this study the dynamic behaviour of perforated microplates oscillating under the effect of squeeze film damping is analyzed. A numerical approach is adopted to predict the effects of damping and stiffness transferred from the surrounding ambient air to oscillating structures ; the effect of hole's cross section and plate's extension is observed. Results obtained by F.E.M. models are compared with experimental measurements performed by an optical interferometric microscope.

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