Computer Science – Other Computer Science
Scientific paper
2008-05-07
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2008, Nice : France (2008)
Computer Science
Other Computer Science
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)
Scientific paper
We report on the hot roller embossing of polymer sheets for the creation of microfluidic structures. Measurements conducted on 100 $\mu$m features showed that the lateral dimensions could be replicated to within 2% tolerance, while over 85% of mould depth was embossed. Feature sizes down to 50 $\mu$m and feature depths up to 30 $\mu$m had been achieved. At lower temperatures, asymmetric pile up of polymer material outside embossed regions was observed with higher pile up occurring on the trailing side of the embossed regions.
Ng Sum Huan
Wang Zhenfeng
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