Statistics – Applications
Scientific paper
Sep 1996
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1996spie.2894...26z&link_type=abstract
Proc. SPIE Vol. 2894, p. 26-33, Detectors, Focal Plane Arrays, and Applications, William G. Frederick; Junhong Su; Marc Wigdor;
Statistics
Applications
Scientific paper
This paper presents a novel and simple photoelectric pressure sensor. The pressure sensing element is a linear capsule with a miniature opaque windowshade on its center. The photo detector is a monolithic dual photodiode. The two photodiodes of this detector are used as reference photodiode and the detection photodiode, respectively. Through this differential structure, the displacement of the windowshade caused by the fluid pressure is picked up, while the influence of the environmental perturbation can be eliminated. The nonlinearity error can be corrected by a single chip computer. This sensor has excellent stability, linearity and high sensitivity as well as good manufacturability. Experiment results show that the minimum detectable pressure is less than 20 Pa with the measurement range of 0 approximately 6 HZ, the nonlinearity error without correction is less than +/- 0.3% within the range of 6000 Pa.
Cao Tianning
Qian Junxia
Zheng Weimin
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