High reflectance coatings for space applications in the EUV

Details High reflectance coatings for space applications in the EUV High reflectance coatings for space applications in the EUV

Jan 1993

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1993spie.1742..384k&link_type=abstract

In: Multilayer and grazing incidence X-ray/EUV optics for astronomy and projection lithography; Proceedings of the Meeting, San

Computer Science

Performance

Ceramic Coatings, Extreme Ultraviolet Radiation, Silicon Carbides, Spaceborne Astronomy, Ultraviolet Reflection, Vapor Deposition, Electromagnetic Spectra, Iue, Optical Materials, Performance Tests

Scientific paper

Advances in optical coating and materials technology have made possible the development of instruments with substantially improved efficiency and made possible to consider more complex optical designs in the EUV. The importance of recent developments in chemical vapor deposited silicon carbide (CVD-SiC), SiC films and multilayer coatings is discussed in the context of EUV instrumentation design. The EUV performance of these coatings as well as some strengths and problem areas for their use in space will be addressed.

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