High-precision mechanical profilometer for grazing incidence optics

Details High-precision mechanical profilometer for grazing incidence optics High-precision mechanical profilometer for grazing incidence optics

Sep 1994

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1994spie.2263..253c&link_type=abstract

Proc. SPIE Vol. 2263, p. 253-262, Current Developments in Optical Design and Optical Engineering IV, Robert E. Fischer; Warren J

Astronomy and Astrophysics

Astrophysics

Scientific paper

A high precision mechanical profilometer (MPROS) has been designed and utilized for metrology on the Advances X-Ray Astrophysics Facility (AXAF) optic program. The instrument serves both as a measure of axial figure during the grinding phase of mirror fabrication and as the AXAF program crosscheck for axial sag error. MPROS has demonstrated an accuracy of 0.25 micrometers P-P over nominally 1 meter of travel. The design is relatively simple, employing Hewlett Packard distance measuring interferometers, an air bearing slide, and coated Zerodur reference surface. This paper will present the AXAF axial metrology requirements, MPROS design, and reference surface calibration. System performance and results will be presented and discussed.

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