Computer Science – Performance
Scientific paper
Nov 2000
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2000spie.4146..143c&link_type=abstract
Proc. SPIE Vol. 4146, p. 143-150, Soft X-Ray and EUV Imaging Systems, Winfried M. Kaiser; Richard H. Stulen; Eds.
Computer Science
Performance
2
Scientific paper
The diffraction gratings are widely used to monochromatize and even focus the soft X-ray radiation produced by the high brilliance third generation synchrotron radiation sources. Nevertheless, the final performance of an instrument that uses a diffraction grating is sensitive to any figure error and to any undesired groove density variation along the surface of the grating itself. Therefore, typical requirements are 0.1 - 0.2 arcsec (even less) on the residual slope errors (after proper shape subtraction), while the groove density is required to be constant along the surface with a percentage error below 0.1%. Vice-versa, sometimes groove density variation is required along the surface to correct spherical aberrations or to change the focal properties of a grating. Since the gratings, in the soft X-ray region, work in grazing incidence mode, the ideal instrument to measure it is a mono-dimensional profilometer. At ELETTRA, the Italian third generation synchrotron radiation source, we have an in house modified version of the Long Trace Profiler.
Cocco Daniele
Sergo Rudi
Sostero Giovanni
Zangrando Marco
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