High-performance micromachined thermopile linear arrays

Details High-performance micromachined thermopile linear arrays High-performance micromachined thermopile linear arrays

Jul 1998

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1998spie.3379..192f&link_type=abstract

Proc. SPIE Vol. 3379, p. 192-197, Infrared Detectors and Focal Plane Arrays V, Eustace L. Dereniak; Robert E. Sampson; Eds.

Computer Science

2

Scientific paper

Linear thermopile infrared detector arrays have been produced with D* values as high as 2.2 X 10(superscript 9) cmHz(superscript 1/2)W for 83 ms response times. Typical responsivity is 1000 V/W. This result has been achieved with Bi-Te and Bi-Sb-Te thermoelectric materials on micromachined silicon nitride membranes. Results for several device geometries are described and compared to literature values for Schwartz type thermocouple detectors and for thin film thermopile detectors and arrays. Measurements of responsivity as a function of modulation frequency and wavelength are presented.

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