Other
Scientific paper
Oct 2004
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2004spie.5488..910k&link_type=abstract
UV and Gamma-Ray Space Telescope Systems. Edited by Hasinger, Günther; Turner, Martin J. L. Proceedings of the SPIE, Volume 548
Other
2
Scientific paper
We have measured the topography and near-normal incidence EUV efficiency of five flat multilayer-coated polymer-overcoated blazed ion-etched holographic test gratings. Blaze angles were in the range 2.0-4.1º. All gratings had a surface roughness <3 Å rms (20-4000 Å). The best grating had a measured efficiency of 29.9% in the second order at 157.9 Å and a derived groove efficiency of 53.0%. At the shortest wavelength investigated (100.0 Å) another grating produced a measured efficiency in the first order of 12.9% and a derived groove efficiency of 33.6%. In third order another grating produced a measured efficiency at 137.8 Å of 13.4% and a derived groove efficiency of 21.8%. To the best of our knowledge these values exceed previous published results. Some issues remain that may be associated with modification of the groove profile by the multilayer coating.
Barbee Troy W. Jr.
Cruddace Raymond G.
Heidemann Klaus F.
Hunter William R.
Kierey Holger
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