Grazing incidence reflectance of SiC films produced by plasma-assisted chemical vapor deposition

Details Grazing incidence reflectance of SiC films produced by plasma-assisted chemical vapor deposition Grazing incidence reflectance of SiC films produced by plasma-assisted chemical vapor deposition

Apr 1988

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1988apopt..27.1499k&link_type=abstract

(SPIE, Conference on Grazing Incidence Optics for Astronomical and Laboratory Applications, San Diego, CA, Aug. 17-19, 1987) App

Astronomy and Astrophysics

Astronomy

1

Protective Coatings, Reflectance, Silicon Carbides, Thin Films, Vapor Deposition, Ceramic Coatings, Grazing Incidence, Plasma Spraying, Spaceborne Telescopes, Ultraviolet Astronomy

Scientific paper

The grazing incidence reflectance of silicon carbide films produced by plasma-assisted chemical vapor deposition has been evaluated in the spectral region from 256 to 1216 A. The results show that reflectivities higher than conventional coatings can be obtained on coatings deposited both on silicon wafers and quartz substrates. Potential application of silicon carbide films for EUV astronomical instruments will be discussed.

Affiliated with

Also associated with

No associations

Rating

Grazing incidence reflectance of SiC films produced by plasma-assisted chemical vapor deposition does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.

If you have personal experience with Grazing incidence reflectance of SiC films produced by plasma-assisted chemical vapor deposition, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Grazing incidence reflectance of SiC films produced by plasma-assisted chemical vapor deposition will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFWR-SCP-O-848249