Statistics – Computation
Scientific paper
Oct 2004
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2004spie.5536...97b&link_type=abstract
Advances in Computational Methods for X-Ray and Neutron Optics. Edited by Sanchez del Rio, Manuel. Proceedings of the SPIE, Vol
Statistics
Computation
1
Scientific paper
A simple genetic algorithm for global optimisation of the reflectivity of multilayer coatings in the extreme ultra-violet and X-ray wavelength ranges has been implemented as a software tool. The genetic algorithm identifies the best-performing multilayer among a population of solutions that evolves while random mutations are applied to the thickness of the layers. The tool is designed for maximising the reflectivity either over a wavelength range at fixed incident angle or over a range of incident directions at fixed energy. The algorithm has been preliminarily tested on two specific applications: a Pt/C multilayer for hard X-rays applications in astrophysics and cosmology and a Mo/Si coating prominent to next generation lithography at 13.5 nm. The results of the analyses are compared to the performances achievable with periodic multilayers and traditional supermirrors.
Binda Pietro D.
Zocchi Fabio E.
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