Formation of densely populated SiOx microtree-like structures on the Si (100) surface using excimer laser irradiation in air

Details Formation of densely populated SiOx microtree-like structures on the Si (100) surface using excimer laser irradiation in air Formation of densely populated SiOx microtree-like structures on the Si (100) surface using excimer laser irradiation in air

Oct 2004

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2004spie.5578..652y&link_type=abstract

Photonics North 2004: Optical Components and Devices. Edited by Armitage, John C.; Fafard, Simon; Lessard, Roger A.; Lampropoul

Computer Science

3

Scientific paper

SiOx microforest-like structures have been produced on Si (100) surfaces by pulsed excimer laser irradiation in air. Scanning electron microscopic observations have indicated these structures, which are composed of aggregated nanoparticles, to be 1-5 μm in diameter and 10-20 μm high, and to have the appearance of trees. XPS analysis has shown them to be composed of a-SiOx (1

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