Fast MTF measurement of CMOS imagers using ISO 12333 slanted-edge methodology

Statistics – Methodology

Scientific paper

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Scientific paper

The ISO 12233 standard provides a fast and efficient way of measuring Modulation Transfer Function (MTF) of digital input devices (such a digital still camera) using a normalized reflective target based on a slanted-edge method. A similar methodology has been applied for measuring MTF of CMOS image sensors, using 12233 slanted-edge technique associated with a prototype transmissive target. In order to validate the results, comparisons have been made between MTF measurements of image sensor implemented using a 0.25 µm process, using this method and sine target direct measurements.

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