Fabrication of IR blocking filter for low energy x-ray applications

Details Fabrication of IR blocking filter for low energy x-ray applications Fabrication of IR blocking filter for low energy x-ray applications

Feb 2002

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2002aipc..605..399n&link_type=abstract

LOW TEMPERATURE DETECTORS: Ninth International Workshop on Low Temperature Detectors. AIP Conference Proceedings, Volume 605, p

Computer Science

Sound

X- And Gamma-Ray Sources, Mirrors, Gratings, And Detectors, X- And Gamma-Ray Telescopes And Instrumentation

Scientific paper

Sufficient IR attenuation and high x-ray throughput are essential elements of experiments using low temperature x-ray detectors for space applications. On our current sounding rocket payload, for example, we use five 180-Å aluminum filters in series, each supported on a 1000-Å parylene film, to shield the detectors from ambient infrared radiation and starlight. There are several problems. The x-ray transmission of the parylene is low, particularly at energies less than 200 eV. Also, the outer IR filter is subject to collecting ice during the cool down procedure, due to residual water outgassed from materials in the refrigerator. We are studying a new filter fabrication approach using basic microelectronic techniques. Polyimide can be spun on a silicon wafer resulting in consistent thicknesses of 200 Å. The silicon wafer can then be fabricated into a fine support grid for maximum x-ray transmission and, via ion implantation, a heater could be patterned into it. Such a structure should be able to address the above problems and be suitable for space application. .

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