Fabrication of bridge-type microcalorimeter arrays with Ti-Au transition-edge-sensors

Details Fabrication of bridge-type microcalorimeter arrays with Ti-Au transition-edge-sensors Fabrication of bridge-type microcalorimeter arrays with Ti-Au transition-edge-sensors

Feb 2002

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2002aipc..605..207u&link_type=abstract

LOW TEMPERATURE DETECTORS: Ninth International Workshop on Low Temperature Detectors. AIP Conference Proceedings, Volume 605, p

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Superconducting Optical, X-Ray, And Gamma-Ray Detectors, X- And Gamma-Ray Sources, Mirrors, Gratings, And Detectors

Scientific paper

The present stage of cryogenic detector development is focused on fabrication of arrays. Arrays of superconducting-transition-edge-sensor (TES) microcalorimeters have generally been fabricated on SiNX membranes. In conventional membrane structures fabricated by backside etching, it is difficult to realize arrays having both mechanical toughness and a large filling factor. It is possible to overcome these difficulties by using a bridge-type membrane structure, in which SiNX membranes are raised above the Si substrate with a gap of 10-50 μm. In order to carry out etching and other processes, we have fabricated a small scale array with a bridge-type membrane structure. A preliminary version of a TES microcalorimeter array with a 5×5 pixel structure had dimensions of 6×10 mm2. Each pixel consisted of a Ti/Au bilayer with a size of 0.5×0.7 mm2 on a 1 μm-thick SiNX membrane of 0.7×2 mm2. Although the current array exhibited a small filling factor of about 0.1, it is possible to obtain a high filling factor by fabricating mushroom-shaped absorbers. .

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