Fabrication and performance of MARS optical modulators for fiber-to-the-home systems

Details Fabrication and performance of MARS optical modulators for fiber-to-the-home systems Fabrication and performance of MARS optical modulators for fiber-to-the-home systems

Sep 1996

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1996spie.2879..300w&link_type=abstract

Proc. SPIE Vol. 2879, p. 300-305, Micromachining and Microfabrication Process Technology II, Stella W. Pang; Shih-Chia Chang; Ed

Computer Science

Performance

Scientific paper

The methods used to fabricate silicon optical modulators (MARS) devices
in several material systems are described. Experimental results showing
low bit-error-rate performance at 3.5 Mbit/sec. with a broad optical
spectrum are presented.

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