Computer Science
Scientific paper
Jun 1998
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1998aipc..430..425r&link_type=abstract
The eleventh international conference on fourier transform spectroscopy. AIP Conference Proceedings, Volume 430, pp. 425-427 (1
Computer Science
Organic Compounds, Polymers, Infrared Spectrometers, Auxiliary Equipment, And Techniques, Lithography, Masks And Pattern Transfer
Scientific paper
Using photolithography, thin polymer films with a controlled geometric pattern were produced as a test pattern for infrared microspectroscopy(IMS). Test samples were prepared on barium fluoride for transmission and gold mirrors for reflection measurements. The test pattern and methods for evaluating an IMS system are described. The purpose of this study is to provide a quantitative method for determining the ability of a microscope to define the infrared beam to a specific area and to determine limits of detection.
Hornlein Robert W.
Reffner John A.
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