Evaluation of iteration methods used when modeling scattering from features on surfaces using the discrete-dipole approximation.

Details Evaluation of iteration methods used when modeling scattering from features on surfaces using the discrete-dipole approximation. Evaluation of iteration methods used when modeling scattering from features on surfaces using the discrete-dipole approximation.

Sep 1998

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1998jqsrt..60..493n&link_type=abstract

Journal of Quantitative Spectroscopy and Radiative Transfer, vol. 60, issue 3, pp. 493-500

Computer Science

3

Scattering: Numerical Methods

Scientific paper

The authors address modeling of light scattering from features on surfaces and the numerical aspects associated with it. In this context, the features represent micro-circuit components and/or particle contaminates on silicon wafers. The discrete dipole approximation method is used to model the scattering features, and various solution routines are presented. The quasi-minimal residual method is shown to be the most efficient iteration method used considering the wide range of parameters investigated.

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