Enhancement of the reflectivity of multilayer X-ray mirrors by ion polishing

Computer Science – Performance

Scientific paper

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Grazing Incidence, Ion Impact, Laminates, Metal Polishing, Mirrors, X Ray Telescopes, Carbon, Cobalt Compounds, Rhenium Compounds, Ruthenium Compounds

Scientific paper

The performance of multilayer X-ray mirrors is improved by smoothing the boundaries within the multilayer stack with ion bombardment at grazing angles of incidence. The process is applied to Co-C and to RhRu-C mirrors for normal incidence telescopes at 63.5 and 114 A, and the reflectivity is increased by a factor of 2 in both cases. Accumulation of roughness during deposition is eliminated. An estimate of the presently achievable reflectivity for normal incidence mirrors in the 44 to 120 A wavelength range is given.

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