Computer Science – Other Computer Science
Scientific paper
2008-02-21
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
Computer Science
Other Computer Science
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Scientific paper
This study has successfully demonstrated a novel self-heating formaldehyde gas sensor based on a thin film of NiO sensing layer. A new fabrication process has been developed in which the Pt micro heater and electrodes are deposited directly on the substrate and the NiO thin film is deposited above on the micro heater to serve as sensing layer. Pt electrodes are formed below the sensing layer to measure the electrical conductivity changes caused by formaldehyde oxidation at the oxide surface. Furthermore, the upper sensing layer and NiO/Al2O3 co-sputtering significantly increases the sensitivity of the gas sensor, improves its detection limit capability. The microfabricated formaldehyde gas sensor presented in this study is suitable not only for industrial process monitoring, but also for the detection of formaldehyde concentrations in buildings in order to safeguard human health.
Chou Po-Cheng
Hsiao Chiuder
Lee Chia-Yen
Ma Rong-Hua
Wang Yu-Hsiang
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