Computer Science – Other Computer Science
Scientific paper
2007-11-21
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2006, Stresa, Lago Maggiore : Italie (2006)
Computer Science
Other Computer Science
Submitted on behalf of TIMA Editions (http://irevues.inist.fr/tima-editions)
Scientific paper
During recent years, microelectronics helped to develop complex and varied technologies. It appears that many of these technologies can be applied successfully to realize Seebeck micro generators: photolithography and deposition methods allow to elaborate thin thermoelectric structures at the micro-scale level. Our goal is to scavenge energy by developing a miniature power source for operating electronic components. First Bi and Sb micro-devices on silicon glass substrate have been manufactured with an area of 1cm2 including more than one hundred junctions. Each step of process fabrication has been optimized: photolithography, deposition process, anneals conditions and metallic connections. Different device structures have been realized with different micro-line dimensions. Each devices performance will be reviewed and discussed in function of their design structure.
Bablet Jacqueline
Fournier J. M.
Plissonnier Marc
Salvi C.
Savelli Guillaume
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