Statistics
Scientific paper
Jun 1992
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1992esasp.340..203h&link_type=abstract
In ESA, Frequency and Time Forum p 203-207 (SEE N93-24978 09-70)
Statistics
Elastic Waves, Gas Detectors, Interdigital Transducers, Lamb Waves, Loads (Forces), Mass Distribution, Sensitivity, Sh Waves, Bulk Acoustic Wave Devices, Film Thickness, Normalizing (Statistics), Piezoelectric Transducers, Quartz Crystals, Substrates, Surface Acoustic Wave Devices, Thin Films
Scientific paper
The theoretical analysis of the possibility of measuring mass loading variations by means of bulk wave modes generated with Interdigital Transducers (IDT) is addressed. Elastic waves are generated and detected by means of IDT transducers plated on piezoelectric fields or substrates. It was shown that both surface and bulk elastic waves can be launched by IDT's. The type of elastic wave excited is related to the piezoelectric material properties and its crystallographic orientation. In a thin piezoelectric plate, surface and bulk vibrations propagate in the volume of the plate. Thus, propagating plate modes are stationary in the plate thickness. Two kinds of modes can be distinguished: Shear Horizontal (SH) and Lamb modes. To adapt a plate mode device to a gas sensor, it is necessary to deposit a selectivity sensitive film which can absorb the gas to be detected. The velocity of the wave is then modified because the induced variation of the mass loading of the film changes the boundary conditions. The theoretical study of the mass loading sensitity of both SH and Lamb modes is presented. For instance, expected sensitivity for the SH mode of a gas sensor is in the order of 1 ng of the gas for 1 sq cm of sensitive film.
Hauden D.
Hoummady M.
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