Computer Science – Performance
Scientific paper
Sep 1997
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1997spie.3226..147g&link_type=abstract
Proc. SPIE Vol. 3226, p. 147-154, Microelectronic Structures and MEMS for Optical Processing III, M. Edward Motamedi; Hans P. He
Computer Science
Performance
Scientific paper
The mechanical anti-reflection switch is an optical modulator based on the electrostatically induced vertical movement of a membrane above the substrate. Two basic types may exist, one where the membrane is insulating, wherein an electrode with an optical window is placed upon the membrane, and a second where the membrane is conducting, requiring no separate electrode. The first has the advantage that the region in the optical window is flat, but the disadvantage that since the window has no force applied to it, higher voltages are required for the same speed. We examine here the effects of membrane curvature on the optical performance of the second type.
Goossen Keith W.
Greywall Dennis S.
Walker James A.
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