Double expansion of wavefront deformation in Zernike polynomials over the pupil and the field of view of optical systems: lens design, testing, and alignment

Details Double expansion of wavefront deformation in Zernike polynomials over the pupil and the field of view of optical systems: lens design, testing, and alignment Double expansion of wavefront deformation in Zernike polynomials over the pupil and the field of view of optical systems: lens design, testing, and alignment

Dec 1998

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1998spie.3430...80a&link_type=abstract

Proc. SPIE Vol. 3430, p. 80-87, Novel Optical Systems and Large-Aperture Imaging, Kevin D. Bell; Michael K. Powers; Jose M. Sasi

Computer Science

Scientific paper

The double expansion of wavefront deformation in Zernike polynomials over the pupil and the field-of-view is a promising approach for lens design, testing, and alignment. Conventional wavefront representation in Zernike polynomial expansion from the pupil coordinates makes it very cumbersome to consider the optical system condition over the field-of- view. Evaluating the properties of symmetry of centered and perturbed systems can provide a compact representation of wavefront deformation over the field-of-view. Even for complicated optical systems such as lithography objectives, 8 to 12 global coefficients can provide a comprehensive system description. Coefficients for centered and perturbed systems are independent.

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