Differential Phase Evaluation Assessment Applying Monte Carlo Based Techniques

Mathematics – Probability

Scientific paper

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Interferometry, Probability, Phase Measurement, Image Processing, Pattern Recognition, Phase Shifting Interferometry, Probability Theory, Phase Retrieval, Image Forming And Processing, Pattern Recognition

Scientific paper

Many metrological applications require a measurement associated to the phase between two patterns. This can be directly recovered with differential phase shifting algorithms (DPSAs) combining, in a non-linear way for example, known phase shifting algorithms (PSAs). In previous works we have studied the response of several families of DPSAs to the main error sources by using numerical simulation, a linear approach and a Fourier description of the differential process. Here we present an error analysis using the Monte Carlo simulation method to characterise the systematic and random sensitivities in a family of DPSAs.

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