Computer Science – Performance
Scientific paper
Jan 1979
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1979spie..192..223h&link_type=abstract
In: Interferometry; Proceedings of the Seminar, San Diego, Calif., August 29, 30, 1979. (A80-44308 19-35) Bellingham, Wash., Soc
Computer Science
Performance
Differential Interferometry, Imaging Techniques, Laser Applications, Microscopy, Topography, Beam Splitters, Data Recording, Mathematical Models, Nondestructive Tests, Performance Prediction, Surface Properties
Scientific paper
The use of Nomarski differential interference contrast (DIC) microscopy has been extended to provide nondestructive, quantitative analysis of a sample's surface topography. Theoretical modeling has determined the dependence of the image intensity on the microscope's optical components, the sample's optical properties, and the sample's surface orientation relative to the microscope. Results include expressions to allow the inversion of image intensity data to determine sample surface slopes. A commercial Nomarski system has been modified and characterized to allow the evaluation of the optical model. Data have been recorded with smooth, planar samples that verify the theoretical predictions.
Gordon R. L.
Hartman Stephen J.
Lessor D. L.
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