Development of fully depleted back-illuminated charge-coupled devices

Astronomy and Astrophysics – Astronomy

Scientific paper

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Scientific paper

The status of CCD development efforts at Lawrence Berkeley National Laboratory is reviewed. Fabrication technologies for the production of back-illuminated, fully depleted CCD's on 150 mm diameter wafers are described. In addition, preliminary performance results for high-voltage compatible CCD's, including a 3512 x 3512, 10.5 μm pixel CCD for the proposed SuperNova Acceleration Probe project, are presented.

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