Development of an array of transition edge sensors for application in X-ray astronomy

Astronomy and Astrophysics – Astronomy

Scientific paper

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Microcalorimeter, X-Ray Astronomy, Imaging Array, X-Ray Detector, Cryogenic Sensor, Micro Machining, Xeus

Scientific paper

We report on the development activities towards a cryogenic array of micro-calorimeters, based on voltage-biased Ti/Au transition edge thermometers. Fabrication issues are discussed along the lines of two fabrication routes. One route utilizes bulk micromachining in [110] Si wafers, the other route surface micromachining with a sacrificial layer. Prototype 5×5 arrays have been fabricated and we present the first performance data: Two arrays were irradiated with 5.9keV X-ray irradiation and an energy resolution of 6-7eV FWHM was obtained. The arrays have been designed and their performance is analyzed with the aid of finite element simulation of the electrothermal behavior of a single pixel and thermal conductivity in the supporting structure.

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