Other
Scientific paper
Jan 1994
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1994phdt........18n&link_type=abstract
Thesis (PH.D.)--FLORIDA INTERNATIONAL UNIVERSITY, 1994.Source: Dissertation Abstracts International, Volume: 56-01, Section: B,
Other
Nanometer Technology
Scientific paper
In the 1970s the ionized cluster beam deposition (ICB) technique appeared as a potential new method for thin film deposition. But during the mid 80s it became controversial. Researchers are still working to understand more about the cluster formation process and dependance of film qualities on the system parameters. Ionized cluster beam deposition uses a beam of ionized, accelerated atom clusters to grow thin films. Earlier unsuccessful attempts at forming such cluster beams used 1 mm x 1 mm nozzles at a crucible pressure around 2 Torr. This dissertation reports large zinc cluster synthesis by using converging -diverging nozzles 18 mm long and 0.4 mm in diameter at the throat and by increasing the crucible pressure to the 1000 Torr range. Electron bombardment was used for crucible heating and the cluster size distribution was analyzed by deflected deposition cluster measurements. The cluster distribution for a temperature of 1260^ circC peaked around an average of 2200 atoms per cluster. Cluster velocity was nearly constant over the entire distribution in agreement with what would be expected for a homogeneous nucleation process. Over 99% of the ionized beam was in the form of clusters at the substrate. Cluster distribution was found to be a function of crucible pressure. Increasing the pressure from 2.8 to 11.3 atm is accompanied by an increase in peak average cluster size from 200 to over 2,200 atoms per clusters. Thin films were deposited using cluster beams formed at a crucible temperature of 1260^circC with cluster energies varying from thermal to thermal plus 700 eV. Surface roughness of cluster formed films increase with increasing incident cluster energy. Temperature profile studies and calculations of heat transfer occurring during cluster formation at the crucible nozzle suggest that the heat of condensation of zinc clusters is absorbed by the nozzle. Intentional enhancement of this mechanism by suitable cooling nozzle designs could lead to similar cluster synthesis of other materials with lower vapor pressure at presently achievable crucible temperature.
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