Development of a MEMS Velocity Filter for ENA Measurements

Details Development of a MEMS Velocity Filter for ENA Measurements Development of a MEMS Velocity Filter for ENA Measurements

Dec 2006

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2006agufmsm13a0342v&link_type=abstract

American Geophysical Union, Fall Meeting 2006, abstract #SM13A-0342

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2794 Instruments And Techniques, 7837 Neutral Particles (2151), 7894 Instruments And Techniques

Scientific paper

Measurements of Energetic Neutral Atoms (ENAs) have begun to play a major role in the understanding of magnetospheres, the heliosphere and of the interstellar medium beyond. The fundamental technical challenge that must be overcome to make ENA measurements is the separation of low fluxes of ENAs from a background of UV photons. In this study we describe a simple ENA velocity filter based on the assembly of several separated layers of Micro-Electrical-Mechanical Systems (MEMS) apertures. MEMS provide an ideal technology for building such apertures as they are intrinsically low power, high reliability devices, which readily survive the rigors of space flight. We show the results of two prototype MEMS devices that we developed to demonstrate the "proof-of-concept" for such sensors. These prototypes use a series of micro-mechanical shutters that open and close allowing only the particles in a controlled velocity range to pass through to a detector. Our MEMS shutters are built on a silicon wafer with etched holes to allow particles to pass through. Individual through holes have an open area of 10s 100s of microns. The shutters demonstrate the control of the transmission of particles and light in laboratory testing. Such devices can also be used as precision apertures for numerous other space instrument applications.

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