Determination of nitrogen density in direct current (dc) glow discharges

Details Determination of nitrogen density in direct current (dc) glow discharges Determination of nitrogen density in direct current (dc) glow discharges

Jul 2008

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2008pobeo..84..321p&link_type=abstract

Publications of the Astronomical Observatory of Belgrade, vol. 84. pp. 321-324

Astronomy and Astrophysics

Astronomy

Scientific paper

Measurement of atomic and molecular nitrogen in an oxygen--nitrogen dc plasma has been presented. This is achieved by monitoring the intensities of the atomic nitrogen spectral line at 821.6 nm and the molecular nitrogen bandhead at 337.1 nm, relative to the atomic oxygen spectral line at 844.7 nm. Oxygen is the one of most frequently used gases for surface chemical treatment, including deposition and etching and therefore the ability to measure and control the process and chemical composition of the process is essential.
To validite the oxygen actimometry method for N_2 -- xO_2 (where x varies from zero to one) dc plasmas, threshold tests have been performed with Ar actinometry.

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